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309 lines
3.7 KiB
YAML
309 lines
3.7 KiB
YAML
schema_version: 1.0.0
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foundry: CUMEC
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technology: CUMEC_CSiP130Cu
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constants:
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lib_path: GDS_lib\
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W_ISL: 5
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SP_ISL: 5
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SZ_CT: 0.25
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SP_CT: 0.35
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SP_METAL: 1.5
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layers:
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FETCH_COR:
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layer:
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- 31
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- 1
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aliases:
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- STRIP_COR
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FETCH_CLD:
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layer:
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- 31
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- 2
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aliases:
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- STRIP_CLD
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FETCH_TRE:
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layer:
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- 31
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- 3
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aliases:
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- STRIP_TRE
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FETCH_HOL:
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layer:
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- 31
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- 4
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aliases:
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- STRIP_HOL
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SETCH_COR:
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layer:
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- 32
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- 1
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aliases:
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- SRIB_COR
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SETCH_CLD:
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layer:
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- 32
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- 2
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aliases:
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- SRIB_CLD
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SETCH_TRE:
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layer:
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- 32
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- 3
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aliases:
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- SRIB_TRE
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SETCH_HOL:
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layer:
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- 32
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- 4
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aliases:
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- SRIB_HOL
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METCH_COR:
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layer:
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- 33
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- 1
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aliases:
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- RIB_COR
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METCH_CLD:
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layer:
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- 33
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- 2
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aliases:
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- RIB_CLD
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METCH_TRE:
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layer:
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- 33
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- 3
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aliases:
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- RIB_TRE
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METCH_HOL:
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layer:
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- 33
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- 4
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aliases:
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- RIB_HOL
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HEATER:
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layer:
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- 19
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- 0
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CT:
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layer:
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- 50
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- 0
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aliases:
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- VIA_H2M
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- VIA_S2M
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V1:
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layer:
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- 51
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- 0
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aliases:
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- VIA_M2M
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METAL:
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layer:
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- 11
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- 1
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METAL_SLTBK:
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layer:
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- 11
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- 21
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METAL_2:
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layer:
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- 12
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- 1
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METAL_2_SLTBK:
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layer:
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- 12
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- 21
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BOND_PAD:
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layer:
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- 20
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- 0
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aliases:
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- PAD
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PASS1:
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layer:
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- 60
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- 0
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PASS2:
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layer:
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- 63
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- 0
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OPEN:
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layer:
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- 61
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- 0
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aliases:
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- GC_OPEN
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ISL:
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layer:
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- 67
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- 0
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NW:
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layer:
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- 21
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- 0
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PW:
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layer:
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- 22
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- 0
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NLD:
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layer:
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- 23
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- 0
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PLD:
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layer:
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- 24
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- 0
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NLD2:
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layer:
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- 25
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- 0
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PLD2:
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layer:
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- 26
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- 0
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NP:
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layer:
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- 27
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- 0
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PP:
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layer:
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- 28
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- 0
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EPI:
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layer:
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- 40
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- 0
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aliases:
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- GE
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SA:
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layer:
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- 36
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- 0
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ABOX:
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layer:
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- 97
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- 1
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PBOX:
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layer:
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- 97
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- 2
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NOFILL:
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layer:
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- 92
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- 0
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LOGO:
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layer:
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- 90
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- 0
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PINREC:
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layer:
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- 95
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- 0
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DEVREC:
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layer:
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- 1001
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- 0
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xsections:
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strip:
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layers:
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- layer: STRIP_COR
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growx: 0
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growy: 0
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- layer: STRIP_CLD
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growx: 2
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growy: 2
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strip_cor:
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layers:
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- layer: STRIP_COR
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growx: 0
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growy: 0
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rib_s:
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layers:
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- layer: STRIP_COR
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growx: 0
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growy: 0
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- layer: STRIP_CLD
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growx: 2
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growy: 2
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rib:
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layers:
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- layer: RIB_COR
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growx: 0
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growy: 0
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- layer: RIB_CLD
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growx: 4
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growy: 4
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- layer: STRIP_COR
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growx: 2
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growy: 2
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- layer: STRIP_CLD
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growx: 4
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growy: 4
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rib_slab:
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layers:
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- layer: RIB_COR
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growx: 0
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growy: 0
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- layer: RIB_CLD
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growx: 4
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growy: 4
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drib:
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layers:
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- layer: RIB_COR
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growx: 0
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growy: 0
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- layer: RIB_CLD
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growx: 4
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growy: 4
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- layer: STRIP_COR
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growx: 2
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growy: 2
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- layer: STRIP_CLD
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growx: 4
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growy: 4
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pad:
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layers:
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- layer: METAL_2
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growx: 0
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growy: 0
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- layer: PAD
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growx: 0
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growy: 0
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- layer: PASS1
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growx: -2.5
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growy: -2.5
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- layer: PASS2
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growx: -2.5
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growy: -2.5
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isl:
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layers:
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- layer: ISL
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growx: 0
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growy: 0
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- layer: STRIP_CLD
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growx: 1
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growy: 1
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- layer: GC_OPEN
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growx: 3
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growy: 3
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metal:
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layers:
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- layer: METAL
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growx: 0
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growy: 0
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- layer: METAL_SLTBK
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growx: 0
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growy: 0
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metal_2:
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layers:
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- layer: METAL_2
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growx: 0
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growy: 0
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- layer: METAL_2_SLTBK
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growx: 0
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growy: 0
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materials: {}
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