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282 lines
3.3 KiB
YAML
282 lines
3.3 KiB
YAML
schema_version: 1.0.0
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foundry: IMEC
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technology: IMEC_Si220_Active
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constants:
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lib_path: GDS_lib\
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W_ISL: 5
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SP_ISL: 5
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SZ_CT: 0.25
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SP_CT: 0.35
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SP_METAL: 1.5
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layers:
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WG_COR:
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layer:
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- 37
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- 4
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aliases:
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- STRIP_COR
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WG_CLD:
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layer:
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- 37
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- 5
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aliases:
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- STRIP_CLD
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WG_TRE:
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layer:
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- 37
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- 6
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aliases:
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- STRIP_TRE
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WG_PRI:
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layer:
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- 38
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- 0
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aliases:
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- STRIP_PRI
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FC_COR:
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layer:
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- 35
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- 4
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aliases:
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- SRIB_COR
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FC_CLD:
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layer:
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- 35
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- 5
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aliases:
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- SRIB_CLD
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FC_TRE:
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layer:
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- 35
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- 6
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aliases:
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- SRIB_TRE
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FC_PRI:
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layer:
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- 36
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- 0
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aliases:
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- SRIB_PRI
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SKT_COR:
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layer:
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- 43
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- 4
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aliases:
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- RIB_COR
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SKT_CLD:
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layer:
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- 43
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- 5
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aliases:
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- RIB_CLD
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SKT_TRE:
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layer:
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- 43
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- 6
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aliases:
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- RIB_TRE
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SKT_PRI:
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layer:
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- 44
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- 0
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aliases:
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- RIB_PRI
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FCW_COR:
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layer:
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- 31
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- 24
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FCW_CLD:
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layer:
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- 31
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- 25
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FCW_TRE:
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layer:
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- 31
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- 26
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FCW_PRI:
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layer:
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- 32
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- 0
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METPASS:
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layer:
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- 18
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- 0
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aliases:
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- PAD
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MHD:
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layer:
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- 14
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- 0
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aliases:
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- HEATER
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PCON:
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layer:
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- 10
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- 0
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aliases:
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- VIA_S2M
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PVH:
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layer:
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- 53
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- 0
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aliases:
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- VIA_H2M
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M1_DRW:
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layer:
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- 11
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- 0
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aliases:
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- METAL
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M1_NOFILL:
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layer:
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- 11
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- 9
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M2_DRW:
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layer:
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- 13
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- 0
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aliases:
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- METAL_2
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M2_NOFILL:
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layer:
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- 13
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- 9
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VIA12:
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layer:
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- 12
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- 0
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aliases:
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- VIA_M2M
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LPASS:
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layer:
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- 91
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- 0
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aliases:
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- GC_OPEN
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PASS1:
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layer:
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- 16
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- 0
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aliases:
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- SiN_OPEN
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PASS2:
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layer:
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- 17
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- 0
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aliases:
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- PAD_OPEN
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EXPOWG:
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layer:
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- 84
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- 0
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N1:
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layer:
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- 2
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- 0
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P1:
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layer:
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- 3
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- 0
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N2:
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layer:
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- 6
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- 0
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P2:
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layer:
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- 7
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- 0
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NBODY:
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layer:
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- 25
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- 0
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PBODY:
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layer:
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- 26
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- 0
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NP:
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layer:
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- 4
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- 0
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PP:
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layer:
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- 5
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- 0
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xsections:
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strip:
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layers:
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- layer: STRIP_COR
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growx: 0
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growy: 0
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- layer: STRIP_CLD
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growx: 2
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growy: 2
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strip_cor:
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layers:
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- layer: STRIP_COR
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growx: 0
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growy: 0
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rib_s:
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layers:
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- layer: RIB_COR
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growx: 0
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growy: 0
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- layer: RIB_CLD
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growx: 2
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growy: 2
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rib:
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layers:
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- layer: RIB_COR
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growx: 0
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growy: 0
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- layer: RIB_CLD
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growx: 4.1
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growy: 4.1
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- layer: STRIP_COR
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growx: 4
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growy: 4
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- layer: STRIP_CLD
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growx: 6.5
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growy: 6.5
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drib:
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layers:
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- layer: RIB_COR
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growx: 0
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growy: 0
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- layer: RIB_CLD
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growx: 4
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growy: 4
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- layer: STRIP_COR
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growx: 2
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growy: 2
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- layer: STRIP_CLD
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growx: 4
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growy: 4
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pad:
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layers:
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- layer: METAL_2
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growx: 0
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growy: 0
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- layer: SiN_OPEN
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growx: -3
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growy: -3
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- layer: PAD
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growx: 0
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growy: 0
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- layer: PAD_OPEN
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growx: -3
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growy: -3
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expowg:
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layers:
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- layer: EXPOWG
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growx: 0
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growy: 0
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- layer: FCW_COR
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growx: 1
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growy: 1
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- layer: FCW_CLD
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growx: 3
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growy: 3
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materials: {}
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