=
396 lines
13 KiB
Python
396 lines
13 KiB
Python
# LEGACY TECHNOLOGY MODULE - DISABLED
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# This source was moved out of the active technology package.
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# Technologies are now loaded from foundry-local YAML manifests via Foundry(manifest).
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#
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# from .Foundry import Foundry
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#
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#
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# class EOM1_2ML_CU(Foundry):
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# MANIFEST = "silterra/EMO1_2ML_CU.yml"
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#
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#
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# # ----------------------------------------------------------------------
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# # LEGACY INLINE TECHNOLOGY SOURCE - DISABLED
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# # Kept for traceability while YAML manifests are the source of truth.
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# # ----------------------------------------------------------------------
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# # from .Foundry import Foundry
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# # from .layer_models import LayerSpec, XSectionLayerSpec, XSectionSpec
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# #
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# #
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# # LBR_SOURCE_FILE = "EMO1 process file 2ML Cu + Al RDL Rev1 2023R2.lbr"
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# # PROCESS_REVISION = "c47fe0e44735e170addb3f68fa8b4387"
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# # OPTICAL_MATERIAL_REVISION = "77d93f81a36e99288ae982ff91bfedca"
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# #
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# # SI = "Layer Builder Si (Silicon) - Palik"
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# # FE_PECVD_NITRIDE = "SilTerra Front End PECVD Nitride"
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# # FE_LPCVD_NITRIDE = "SilTerra Front End LPCVD Nitride"
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# # GERMANIUM = "SilTerra Germanium"
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# # TUNGSTEN = "W (Tungsten) - Palik"
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# # BE_OXIDE = "SilTerra Back End Oxide"
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# # BE_NITRIDE = "SilTerra Back End Nitride"
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# # COPPER = "Cu (Copper) - Palik"
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# # TIN = "TiN - Palik"
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# # ALUMINIUM = "Al (Aluminium) - Palik"
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# # ETCH = "etch"
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# #
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# #
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# # class EOM1_2ML_CU(Foundry):
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# #
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# # ## Generall parameters
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# # STD_SMWG_WIDTH = 0.45
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# # SLAB_GROWTH = 2
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# # W_METAL_MIN = 5
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# # SPACING_HEATER_MIN = 2
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# # SPACING_METAL_MIN = 4
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# # W_HEATER_MIN = 3
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# #
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# # lib_path = "GDS_lib\\"
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# #
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# # PROCESS_NAME = "EMO1"
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# # PROCESS_REVISION = PROCESS_REVISION
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# # OPTICAL_MATERIAL_REVISION = OPTICAL_MATERIAL_REVISION
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# # LBR_SOURCE_FILE = LBR_SOURCE_FILE
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# #
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# # LAYERS = {
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# # "WG_HM": LayerSpec(
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# # name="WG_HM",
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# # layer=(275, 0),
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# # material=SI,
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# # z_start=0.0,
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# # thickness=0.22,
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# # sidewall_angle=83.0,
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# # process="Grow",
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# # description="Strip Waveguide",
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# # ),
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# # "WG_STRIP": LayerSpec(
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# # name="WG_STRIP",
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# # layer=(101, 251),
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# # description="Legacy/layout-only strip waveguide layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "WG_LOWRIB": LayerSpec(
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# # name="WG_LOWRIB",
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# # layer=(100, 90),
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# # material=SI,
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# # z_start=0.0,
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# # thickness=0.07,
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# # sidewall_angle=83.0,
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# # process="Grow",
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# # description="Low Rib Waveguide",
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# # ),
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# # "WG_HIGHRIB": LayerSpec(
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# # name="WG_HIGHRIB",
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# # layer=(232, 0),
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# # material=SI,
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# # z_start=0.0,
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# # thickness=0.15,
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# # sidewall_angle=83.0,
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# # process="Grow",
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# # description="High Rib Waveguide",
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# # ),
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# #
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# # "HEATER": LayerSpec(
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# # name="HEATER",
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# # layer=(29, 30),
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# # material=TIN,
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# # z_start=1.22,
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# # thickness=0.12,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="Heater",
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# # ),
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# # "CT_SI": LayerSpec(
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# # name="CT_SI",
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# # layer=(268, 0),
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# # material=TUNGSTEN,
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# # z_start=0.22,
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# # thickness=1.0,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="Contact Silicon",
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# # ),
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# # "CT_GE": LayerSpec(
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# # name="CT_GE",
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# # layer=(35, 0),
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# # material=TUNGSTEN,
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# # z_start=0.72,
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# # thickness=0.5,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="Contact Germanium",
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# # ),
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# # "GE_EPI": LayerSpec(
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# # name="GE_EPI",
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# # layer=(264, 0),
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# # material=GERMANIUM,
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# # z_start=0.22,
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# # thickness=0.5,
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# # process="Grow",
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# # description="Composite Germanium Epitaxy drawing layer from bot/top .lbr rows.",
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# # ),
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# #
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# # "UTV": LayerSpec(
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# # name="UTV",
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# # layer=(172, 0),
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# # material=COPPER,
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# # z_start=2.05,
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# # thickness=1.23,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="UTV",
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# # ),
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# # "RDL_VIA": LayerSpec(
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# # name="RDL_VIA",
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# # layer=(194, 0),
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# # material=ALUMINIUM,
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# # z_start=5.51,
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# # thickness=1.33,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="RDL Via",
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# # ),
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# #
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# # "UTM": LayerSpec(
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# # name="UTM",
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# # layer=(173, 0),
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# # material=COPPER,
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# # z_start=1.22,
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# # thickness=0.83,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="UTM",
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# # ),
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# # "UTM2": LayerSpec(
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# # name="UTM2",
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# # layer=(197, 0),
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# # material=COPPER,
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# # z_start=3.28,
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# # thickness=2.23,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="UTM2",
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# # ),
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# # "RDL_MET": LayerSpec(
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# # name="RDL_MET",
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# # layer=(195, 0),
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# # material=ALUMINIUM,
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# # z_start=6.84,
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# # thickness=1.2,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="RDL Aluminium",
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# # ),
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# #
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# # "PAD_ELE": LayerSpec(
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# # name="PAD_ELE",
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# # layer=(100, 170),
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# # material=ETCH,
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# # z_start=8.04,
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# # thickness=1.0,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="Pad Electrical",
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# # ),
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# # "PAD_OPTICAL": LayerSpec(
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# # name="PAD_OPTICAL",
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# # layer=(100, 160),
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# # material=ETCH,
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# # z_start=7.34,
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# # thickness=0.5,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="Pad Optical",
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# # ),
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# # "PAD_AL": LayerSpec(
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# # name="PAD_AL",
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# # layer=(145, 0),
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# # description="Legacy/layout-only aluminium pad layer; not present in the EMO1 .lbr stack.",
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# # ),
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# #
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# # "WG_N": LayerSpec(
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# # name="WG_N",
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# # layer=(263, 0),
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# # material=FE_PECVD_NITRIDE + " / " + FE_LPCVD_NITRIDE,
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# # z_start=0.62,
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# # thickness=0.4,
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# # sidewall_angle=85.0,
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# # process="Grow",
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# # description="PECVD/LPCVD Nitride Waveguide",
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# # ),
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# # "SiN_Rib_WG": LayerSpec(
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# # name="SiN_Rib_WG",
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# # layer=(63, 30),
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# # description="Legacy/layout-only SiN rib waveguide layer; not present in the EMO1 .lbr stack.",
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# # ),
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# #
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# # "SSIN0": LayerSpec(
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# # name="SSIN0",
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# # layer=(283, 0),
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# # material=BE_NITRIDE,
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# # z_start=1.22,
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# # thickness=0.13,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="SSIN0",
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# # ),
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# # "SSIN1": LayerSpec(
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# # name="SSIN1",
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# # layer=(289, 0),
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# # material=BE_NITRIDE,
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# # z_start=2.05,
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# # thickness=0.13,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="SSIN1",
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# # ),
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# # "SSIN2": LayerSpec(
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# # name="SSIN2",
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# # layer=(290, 0),
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# # material=BE_NITRIDE,
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# # z_start=3.28,
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# # thickness=0.13,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="SSIN2",
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# # ),
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# # "SSIN3": LayerSpec(
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# # name="SSIN3",
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# # layer=(291, 0),
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# # material=BE_NITRIDE,
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# # z_start=5.51,
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# # thickness=0.13,
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# # sidewall_angle=90.0,
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# # process="Grow",
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# # description="SSIN3",
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# # ),
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# #
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# # "EXCLUSION": LayerSpec(
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# # name="EXCLUSION",
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# # layer=(57, 0),
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# # description="Legacy/layout-only exclusion layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "SALICIDE": LayerSpec(
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# # name="SALICIDE",
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# # layer=(128, 60),
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# # description="Legacy/layout-only salicide layer; not present in the EMO1 .lbr stack.",
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# # ),
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# #
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# # "DM_EXL": LayerSpec(
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# # name="DM_EXL",
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# # layer=(23, 0),
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# # description="Legacy/layout-only dummy exclusion layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "DM_EXL_FE": LayerSpec(
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# # name="DM_EXL_FE",
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# # layer=(23, 40),
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# # description="Legacy/layout-only front-end dummy exclusion layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "DM_EXL_BE": LayerSpec(
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# # name="DM_EXL_BE",
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# # layer=(23, 41),
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# # description="Legacy/layout-only back-end dummy exclusion layer; not present in the EMO1 .lbr stack.",
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# # ),
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# #
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# # "OXIDE_FACET": LayerSpec(
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# # name="OXIDE_FACET",
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# # layer=(90, 0),
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# # material=ETCH,
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# # z_start=-3.0,
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# # thickness=11.64,
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# # sidewall_angle=98.0,
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# # process="Grow",
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# # description="Deep Oxide Trench; GDS is shared with Deep Silicon Trench in the .lbr.",
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# # ),
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# # "DT": LayerSpec(
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# # name="DT",
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# # layer=(404, 0),
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# # description="Legacy/layout-only deep-trench layer; EMO1 .lbr uses 90:0 for deep trench rows.",
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# # ),
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# #
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# # ### Active part
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# # "P": LayerSpec(
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# # name="P",
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# # layer=(256, 0),
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# # description="Legacy/layout-only implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "N": LayerSpec(
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# # name="N",
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# # layer=(257, 0),
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# # description="Legacy/layout-only implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "PP": LayerSpec(
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# # name="PP",
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# # layer=(258, 0),
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# # description="Legacy/layout-only implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "NP": LayerSpec(
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# # name="NP",
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# # layer=(259, 0),
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# # description="Legacy/layout-only implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "PPP": LayerSpec(
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# # name="PPP",
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# # layer=(260, 0),
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# # description="Legacy/layout-only implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "NPP": LayerSpec(
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# # name="NPP",
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# # layer=(261, 0),
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# # description="Legacy/layout-only implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# #
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# # "PD_SIPP": LayerSpec(
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# # name="PD_SIPP",
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# # layer=(100, 140),
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# # description="Legacy/layout-only photodiode implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # "PD_SINP": LayerSpec(
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# # name="PD_SINP",
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# # layer=(100, 150),
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# # description="Legacy/layout-only photodiode implant layer; not present in the EMO1 .lbr stack.",
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# # ),
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# # }
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# #
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# # XSECTIONS = {
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# # "strip": XSectionSpec(
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# # name="strip",
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# # layers=(
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# # XSectionLayerSpec(layer="WG_HM", growx=0, growy=0),
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# # XSectionLayerSpec(layer="WG_STRIP", growx=4, growy=4),
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# # ),
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# # ),
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# # "rib_low": XSectionSpec(
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# # name="rib_low",
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# # layers=(
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# # XSectionLayerSpec(layer="WG_HM", growx=0, growy=0),
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# # XSectionLayerSpec(layer="WG_LOWRIB", growx=3, growy=3),
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# # XSectionLayerSpec(
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# # layer="WG_STRIP",
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# # leftedge=(-0.5, -3),
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# # rightedge=(-0.5, -3.5),
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# # ),
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# # XSectionLayerSpec(
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# # layer="WG_STRIP",
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# # leftedge=(0.5, 3.5),
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# # rightedge=(0.5, 3),
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# # ),
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# # ),
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# # ),
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# # "metal_1": XSectionSpec(
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# # name="metal_1",
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# # layers=(
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# # XSectionLayerSpec(layer="UTM", growx=0, growy=0),
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# # XSectionLayerSpec(layer="SSIN0", growx=2.5, growy=2.5),
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# # ),
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# # ),
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# # "metal_2": XSectionSpec(
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# # name="metal_2",
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# # layers=(
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# # XSectionLayerSpec(layer="UTM2", growx=0, growy=0),
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# # XSectionLayerSpec(layer="SSIN1", growx=2.5, growy=2.5),
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# # ),
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# # ),
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# # }
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# #
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# # def __init__(self) -> None:
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# # super().__init__()
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